기업맞춤형 기술지원, 정책뉴스, 지원사업소개, 유망기술 제공 등
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기술상담신청 
| 보유기관 | 한국핵융합에너지연구원 |
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|---|---|---|
| 보유지역 | 군산 | |
| 보유실험실 | 플라즈마기술연구센터 3층 306 | |
| 모델명 | EPIC | |
| 장비용도 | - plasma interaction 후 발생된 neutral radical 및 ion을 측정하기 위한 장비 - plasma가 발생되는 진공 챔버에 장착되어 사용되며 높은 sensitivity와 stability - 또한 낮은 partial pressure에서도 고감도의 측정을 할 수 있어야 하며 빠른 측정 시간과 간편하게 control 가능 - 본 질량 분석기는 Mass spectrometer를 이용하여 interaction 후 발생된 neutral radical 및 positive negative ion 분석을 위한 장비로써 plasma 반응 chamber에 연결하여 반응종들을 분석 |
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| 주요사양 | - Mass Range : 1:50 amu - Maximum Operating Pressure : 5 x 10-6 mbar. 1X10-4 mbar with Faraday option - Resolution_50 amu system : 0.1% Valley between adjacent peaks of equal height throughout the mass range - Abundance Sensitivity : 0.1 part per million - Detector : Fast pulse counting detector positive and negative ion - Measurement speed : a. Maximum measurement speed : 500 measurements per second b. Trend Analysis : Typically up to 250 measurements per second - Ion Source : Electron bombardment type radially symmetric. Low-profile - Filament : Two individual side mounting filaments. Oxide coated iridium tandard - Electron emission : Software variable 1μA to 2mA - Electron energy : Software variable 0V to 150 eV - Ion energy : Software variable 0V to 10 eV_x000D_ - Probe axis potential : Software variable -100 to +100 eV - Analyser mounting flange DN-100-CF (6"/150mm OD Conflat-type) base flange. 9mm rod diameter systems include an adaptor housing for mounting to a DN-63-CF (4.5”114mm OD conflat type) - Analyser insertion length from base flange face 411mm from DN-100-CF base flange 196mm from 9mm pole diameter systems. DN-63-CF adapter housing flange - RC7 Control interface unit : Height:315mm/7U. Width:19" rack mounting. Depth:450mm - RF head dimensions : Free-standing module 450mm x 280mm x 250mm with 1M RF cables to the analyser head - Cable length:Control module to RF head : 3M standard. Longer lengths to 30m available - Communications to PC : Up to 15 metres with RS232 link. Up to 750 metres with unbridged Ethernet link. 5m Ethernet and 5m 232 cables included. - Power requirement:110-120 VAC 220-240 VAC 0.25 KVA. |
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| 장비사용 지원신청 |
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