| 기업명 |
|
| Company name |
SEMICOM |
| 대표명 (CEO) |
Seong Bin |
| 대표전화 (Phone) |
031-8011-2380 |
이메일 (E-mail) |
semicom2@semikom.co.kr |
| 홈페이지 (Web Site) |
www.semikom.co.kr |
주소
(ADD.) |
92, Gyeongchung-daero 2050beon-gil, Daewol-myeon, Icheon-si, Gyeonggi-do, Republic of Korea |
주요생산품
Major Product |
Wafer measurement system |
주요 사업분야
(Major Business) |
Wafer measurement system, Thermocouple, Plasma sensor, Heater jacket |
기업 소개
(Company Info.) |
We are with our customers based on our long experience and accumulated technical know-how in the core parts of measurement and control of temperature, flow, vacuum and plasma used in the industry as a whole and especially in semiconductors. Core businesses are 1. Waer measurement system, 2. T/C(Thermocouple), 3. Plasma sensor(probe/flat type), 4. H/J(Heater Jacket), 4. VG&MFC repair service. |
제품(1)
Product(1) |
Wafer measurement system |
제품설명
Description |
measurement system which is used to measure heater’s temp. uniformity in the chamber by using wafer T/C including bluetooth communicatin |
제품(2)
Product(2) |
Thermocouple |
사용용도
Use of Product |
Temp. sensor which measures a temp. profile in the furnace/heater accurately |
제품설명
Description |
Enables to measure a temp. in semiconductor diffusion process of max. 1650℃ accurately |
제품사진
Product photo |
|
제품(3)
Product(3) |
Plasma sensor(probe/flat type) |
사용용도
Use of Product |
Absolute measurement of plasma density |
제품설명
Description |
Measurement system which enables to measure and analyze plasma density in semiconductor chamber accurately through auto control system |
제품사진
Product photo |
|
제품(4)
Product(4) |
Heater Jacket |
사용용도
Use of Product |
Preventing by-products from vacuum line by heating with heater jacket |
제품설명
Description |
System which maintains a vacuum line with constant temp by using thermal materials for preventing by-products from pump, scrubber and vacuum pipe of manufacturing process equipment |
제품사진
Product photo |
|
보유기술 (1)
Technology |
Real-time measurement plasma sensor |
기술 설명
Description |
Absolute measurement of plasma density with Plasma Freq measurement(Measurement uncertainty 2%, the highest level in the world)(Transfer of flat plasma real-time measuring technology with KRISS on Mar, 2022) |
기술사진
Photo |
|
첨 부
Attachment |
 (주)쎄미콤.pdf
|
